Nonlinear vibration of an electrically actuated microresonator tuned by combined DC piezoelectric and electric actuations

This paper studies the nonlinear vibration of a clamped-clamped microresonator under combined electric and piezoelectric actuations. The electric actuation is induced by applying an AC-DC voltage between the microbeam and the electrode plate that lies on opposite sides of the microbeam, and the piezoelectric actuation is induced by applying the DC voltage between upper and lower sides of the piezoelectric layer deposited on the microbeam length. It is assumed that the neutral axis of bending is stretched when the microbeam is deflected. The equations of motion are derived using Newton's second law, and are solved using the multiple-scale perturbation method. It is shown that, depending on the value of DC electric and piezoelectric actuations, geometry and the bending stiffness of the system. A softening or hardening behavior may be realized. It demonstrates that nonlinear behavior of an electrically actuated microresonator may be tuned to a linear behavior by applying a convenient DC electric voltage to the piezoelectric layer, and so an undesirable shift of resonance frequency may be removed. If one lets the applied voltage to the piezoelectric layer be equal to zero, this paper would be an effort to tailor the linear and nonlinear stiffness coefficients of two layered electrically actuated microresonators without the assumption that the lengths of the two layers are equal.