Mid-infrared ridge waveguides fabricated in CaF2 crystal by the technique of O5+ ion irradiation

被引：0
|
作者：
Zhang, Xinbin [1 ]
Cheng, Yazhou [2 ,3 ]
Zhang, Yongcheng [1 ]
机构：
[1] Qingdao Univ, Coll Phys, Ctr Marine Observat & Commun, Qingdao 266071, Peoples R China
[2] Shandong Univ, Shenzhen Res Inst, Shenzhen 518057, Peoples R China
[3] Shandong Univ, Sch Phys, Jinan 250100, Peoples R China
来源：
APPLIED OPTICS | 2021年 / 60卷 / 21期
基金：
中国国家自然科学基金;
关键词：
LASER; SPECTROSCOPY;
D O I：
10.1364/AO.426830
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The fabrication of ridge waveguides in calcium fluoride (CaF2) crystal working at the mid-infrared wavelength was studied. First, the planar waveguide was fabricated by using O5+ ion irradiation, and then the ridge waveguide structure was manufactured by precise diamond blade dicing. The propagation loss was measured by end-face coupling arrangement, and then annealing treatment was implemented to optimize the waveguide performance, and the propagation loss was finally reduced to 0.5 dB/cm. We measured the Raman spectra of the waveguide and substrate to observe the damage to the material lattice caused by O5+ ion irradiation technology. (C) 2021 Optical Society of America
引用
收藏
页码：6302 / 6307
页数：6
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