Laser-heated discharge plasma extreme ultraviolet source

A novel extreme ultraviolet source design is considered, in which an underdense pinch plasma is locally heated by a laser and the raised temperature in the heated region causes excitation followed by 13.5 nm emission. The concept is illustrated with a lithium Z-pinch transversely irradiated by a carbon dioxide laser. Absorption, excitation, thermal conduction and flux-limited radiation are considered in a simple model that predicts up to 40% conversion efficiency (4 pi sr) from 10.6 mu m light to 13.5 nm light in the irradiated region. The effects of source size on scaled source power and efficiency are discussed. Experimental data are presented on a lithium Z-pinch plasma suitable for this source.