Characterization of deep levels at GaAs/GaAs and GaAs/InAs interfaces grown by MBE-interrupted growth technique

被引:7
|
作者
Kaniewska, M.
Engstrom, O.
Pacholak-Cybulska, M.
Sadeghi, M.
机构
[1] Inst Electr Mat Technol, Dept Anal Semicond Nanostruct, PL-02668 Warsaw, Poland
[2] Chalmers, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden
关键词
D O I
10.1002/pssa.200674158
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In order to find the origin of crystalline defects occurring in the preparation of InAs/GaAs quantum dots (QDs), their appearance was tracked through three different sample types designed as Schottky diodes. Specimens with a GaAs cap layer on a GaAs buffer layer as well as with an InAs wetting layer without QDs were grown by molecular beam epitaxy (MBE) using the interrupted growth technique. Deep level transient spectroscopy (DLTS) was used for comparison with structures containing InAs QDs. It was found that two main levels with thermal activation energies of 0.14 - 0.16 eV and 0.46 - 0.52 eV from the conduction band edge, respectively, are grown-in defects, which are characteristic of the growth interrupted interface occuring under an excess of As. Both these levels together with an additional level at 0.10 - 0.12 eV found in the InAs wetting layer structures were also present in those with QDs, probably resulting from strain or In penetration. All three defects were agglomerated close to the interface created by the interrupted growth. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:987 / 991
页数:5
相关论文
共 50 条
  • [21] Comparison of InGaSb/InAs superlattice structures grown by MBE on GaSb, GaAs, and compliant GaAs substrates
    Tomich, DH
    Eyink, KG
    Grazulis, L
    Brown, GL
    Szmulowicz, F
    Mahalingam, K
    Seaford, ML
    Kuo, CH
    Hwang, WY
    Lin, CH
    JOURNAL OF ELECTRONIC MATERIALS, 2000, 29 (07) : 940 - 943
  • [22] Growth and characterization of GaAs and InAs nano-whiskers and InAs/GaAs heterostructures
    Ohlsson, BJ
    Björk, MT
    Persson, AI
    Thelander, C
    Wallenberg, LR
    Magnusson, MH
    Deppert, K
    Samuelson, L
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2002, 13 (2-4): : 1126 - 1130
  • [23] CAPACITANCE CHARACTERIZATION OF GAINAS GROWN ON GAAS BY MBE
    SCHAFF, WJ
    EASTMA, L
    KAVANAGH, KL
    KIRCHNER, PD
    PETIT, GD
    WOODALL, JM
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (05) : 303 - 303
  • [24] A RHEED AND REFLECTANCE ANISOTROPY STUDY OF THE MBE GROWTH OF GAAS, ALAS AND INAS ON GAAS(001)
    ARMSTRONG, SR
    HOARE, RD
    PEMBLE, ME
    POVEY, IM
    STAFFORD, A
    TAYLOR, AG
    JOYCE, BA
    NEAVE, JH
    KLUG, DR
    ZHANG, J
    SURFACE SCIENCE, 1992, 274 (02) : 263 - 269
  • [25] XRD characterization of the MBE grown Si:GaAs, GaAs, AlGaAs, and InGaAs epilayer
    Fu, DC
    Jusoh, MS
    Mat, AFA
    Majlis, BY
    2002 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2002, : 514 - 517
  • [26] Structural investigations of MBE-grown InAs layers on GaAs
    Kim, SM
    Lee, SH
    Kim, H
    Shin, JK
    Leem, JY
    Kim, JS
    Kim, JS
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2002, 40 (01) : 119 - 122
  • [27] SILICON ATOMIC PLANE DOPING IN MBE GROWN INAS/GAAS
    WILLIAMS, RL
    COLERIDGE, P
    WASILEWSKI, ZR
    DION, M
    SACHRAJDA, A
    ROLFE, S
    SOLID STATE COMMUNICATIONS, 1991, 78 (06) : 493 - 497
  • [28] GROWTH AND CHARACTERIZATION OF GAAS ON SI BY MBE
    LI, AZ
    WANG, JX
    QIU, JH
    LIANG, BW
    ZHENG, YL
    WANG, SB
    III-V HETEROSTRUCTURES FOR ELECTRONIC / PHOTONIC DEVICES, 1989, 145 : 305 - 309
  • [29] Structural and electrical characterization of epitaxial DyP/GaAs and DyAs/GaAs grown by MBE
    Lee, PP
    Hwu, RJ
    Sadwick, LP
    Balasubramaniam, H
    Kumar, BR
    Lai, TC
    Chu, SNG
    Alvis, R
    Lareau, RT
    Wood, MC
    COMPOUND SEMICONDUCTORS 1997, 1998, 156 : 159 - 162
  • [30] Structural and electrical characterization of epitaxial DyP/GaAs and DyAs/GaAs grown by MBE
    Lee, PP
    Hwu, RJ
    Sadwick, LP
    Balasubramaniam, H
    Kumar, BR
    Lai, TC
    Chu, SNG
    Alvis, R
    Lareau, RT
    Wood, MC
    1997 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 1998, : 159 - 162