Microstructure of high strength TiN/TiBx multilayered ceramic coatings

被引:0
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作者
Steer, J [1 ]
Inkson, BJ [1 ]
机构
[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
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中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The microstructure of ceramic multilayered coatings deposited using TiN and TiB2 targets has been investigated using HRTEM, chemical mapping and XRD. The coatings predominantly consist of nanocrystalline layers of alternating TiN and TiB, the latter being deposited nonstoichiometrically from the TiB2 target as TiB.B27. Deposition of regions locally highly deficient in boron results in the coherent growth of large columnar TiN grains through many multilayer periods.
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页码:405 / 408
页数:4
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