Multi-physics and multi-scale modelling of materials processing

被引:0
|
作者
Nieminen, RM [1 ]
机构
[1] Helsinki Univ Technol, COMP, Phys Lab, Espoo 02015, Finland
关键词
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
This talk discusses recent developments in the quest to model complex physical phenomena where multiple length and time scales need to be treated. In particular, materials modelling from the atomic-scale interactions to macroscopic continua is highlighted from the point of view of computational science. As a specific example, the case of three-dimensional etching of silicon-based microelectromechanical (MEM) components is presented. Moreover, the parallelisation of real-space-based methods for modelling nanostructures is discussed.
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收藏
页码:55 / 60
页数:6
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