Bimetallic Nanoparticles for optimizing CMOS integrated SnO2 gas sensor devices

被引：0

作者：

Mutinati, Giorgio C. ^{[1
]}

Brunet, Elise ^{[1
]}

Yurchenko, Olena ^{[2
]}

Laubender, Elmar ^{[2
]}

Urban, Gerald ^{[2
]}

Koeck, Anton ^{[3
]}

Steinhauer, Stephan ^{[3
]}

Siegert, Joerg ^{[4
]}

Rohracher, Karl ^{[4
]}

Schrank, Franz ^{[4
]}

Schrems, Martin ^{[4
]}

机构：

[1] AIT Austrian Inst Technol GmbH, A-1220 Vienna, Austria

[2] Univ Freiburg, Freiburg Mat Res Ctr, D-79085 Freiburg, Germany

[3] Mat Ctr Leoben Forsch GmbH MCL, A-8700 Leoben, Austria

[4] Ams AG, A-8141 Unterpremstatten, Austria

来源：

PROCEEDINGS OF THE 2014 44TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC 2014) | 2014年

关键词：

nanotechnology; bimetallic nanoparticles; SnO2 nanocrystalline films; gas sensors; micro-hotplates; CMOS integration; 3D integration; CARBON-MONOXIDE; METAL-OXIDES; OXIDATION; FUEL;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present gas sensor devices based on ultrathin SnO2 films, which are integrated on CMOS fabricated micro-hotplate (mu hp) chips. Bimetallic nanoparticles (NPs) such as PdAu, PtAu, and PdPt have been synthesized for optimizing the sensing performance of these sensors. We demonstrate that functionalization of nanocrystalline SnO2 gas sensing films with PdAu-NPs leads to a strongly improved sensitivity to the toxic gas carbon monoxide (CO) while the cross sensitivity to humidity is almost completely suppressed. We conclude that specific functionalization of CMOS integrated SnO2 thin film gas sensors with different types of NPs is a powerful strategy towards sensor arrays capable for distinguishing several target gases. Such CMOS integrated arrays are highly promising candidates for realizing smart multi-parameter sensing devices for the consumer market.

引用

页码：78 / 81

页数：4

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