Two-channel IR gas sensor with two detectors based on LiTaO3 single-crystal wafer

被引：27
|
作者：
Zhang Wendong [1 ,2 ]
Tan Qiulin [1 ,2 ]
Liu Jun [1 ]
Xue Chenyang [2 ]
Xiong Jijun [2 ]
Chou Xiujian [1 ]
机构：
[1] N Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China
[2] Natl Key Lab Elect Measurement Technol, Taiyuan 030051, Shanxi, Peoples R China
来源：
OPTICS AND LASER TECHNOLOGY | 2010年 / 42卷 / 08期
关键词：
LiTaO3; wafer; Gas cell structure; Gas sensor; TANTALATE THIN-FILMS; PYROELECTRIC SENSOR; CORRELATION SPECTROSCOPY; RUTHENIUM-DIOXIDE; POLLUTION; DESIGN;
D O I：
10.1016/j.optlastec.2010.03.014
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An infrared (IR) single-element detector based on a lithium tantalate (LiTaO3) single-crystal wafer has been successfully fabricated. The preparation and design of the device are discussed and analyzed in detail. The processing of a thin LiTaO3 wafer, the characterization of an IR filter window, and the assembly of the wafer and filter are explained. A LiTaO3 sensor element, a CMOS amplifier, a narrow-band filter (which can be selected to operate within the appropriate spectral region), and the read-out circuits are set into a TO-18 vessel. Each TO-18-type detector offers a single channel (a single detection wavelength). Two TO-18 detectors with different filters, one acting as a detection channel and the other as a reference, a broadband light source, a circuit board and a flake of wire gauze are assembled and integrated into a gilded gas cell for the purpose of detecting ethene gas. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1223 / 1228
页数：6
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