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- [31] One-shot common-path phase-shifting holography based on micropolarizer camera and large-shearing Wollaston Prism ELEVENTH INTERNATIONAL CONFERENCE ON INFORMATION OPTICS AND PHOTONICS (CIOP 2019), 2019, 11209
- [33] In Situ Metrology for Pad Surface Monitoring in CMP Using a Common-Path Phase-Shifting Interferometry: A Feasibility Study APPLIED SCIENCES-BASEL, 2021, 11 (15):