Modeling aspects for high precision absorption measurements

被引:1
|
作者
Dickmann, Walter [1 ,2 ]
Dickmann, Johannes [2 ]
Bruns, Florian F. [1 ,2 ]
Kroker, Stefanie [1 ,2 ]
机构
[1] Tech Univ Carolo Wilhelmina Braunschweig, LENA Lab Emerging Nanometrol, Langen Kamp 6, D-38106 Braunschweig, Germany
[2] Phys Tech Bundesanstalt Braunschweig, Bundesallee 100, D-38106 Braunschweig, Germany
来源
MODELING ASPECTS IN OPTICAL METROLOGY VII | 2019年 / 11057卷
关键词
absorption; mirage effect; photothermal deflection spectroscopy; signal modeling; ray tracing; angular effects; two-photon absorption; pump probe; REFRACTIVE-INDEX; OPTICAL-ABSORPTION; SILICON; CRYSTALLINE; PERFORMANCE;
D O I
10.1117/12.2525690
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Collinear photothermal deflection spectroscopy (PDS) is a widely used method for the spatially resolved determination of the optical attenuation coefficient. In this work we rigorously model the signal contributions in PDS on semiconductors below the band gap energy. The dependencies of the PDS signal on selected experimental parameters (pump beam intensity, crossing angle, chopper frequency and distance from the pump beam focus) are computed and compared with previous calculation results that are based on simplified assumptions. We find that for high pump beam intensities and sample materials with high two photon absorption coefficients beside the mirage effect nonlinear absorption mechanisms have a strong impact on the signal. Furthermore, we show that angular deflection effects can significantly enhance the PDS signal. For example, the conical refractive index field due to the pump beam divergence leads to an angular deflection at readout points outside the pump beam focus. Considering these additional signal contributions is crucial to determine proper absorption properties.
引用
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页数:9
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