Laser deposition of shape-memory alloy for MEMS applications

被引：12
|
作者：
Camposeo, A
Puccini, N
Fuso, F
Allegrini, M
Arimondo, E
Tuissi, A
机构：
[1] Univ Pisa, Dipartimento Fis Enrico Fermi, INFM, I-56127 Pisa, Italy
[2] CNR, IENI, Sez Lecco, I-22053 Lecco, Italy
来源：
APPLIED SURFACE SCIENCE | 2003年 / 208卷
关键词：
PLD; shape-memory effect; MEMS; metal alloy films;
D O I：
10.1016/S0169-4332(02)01448-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码：518 / 521
页数：4
相关论文
共 50 条
  • [21] Pulsed laser deposition and in situ diagnostics of the process applied to shape-memory alloys
    Camposeo, A
    Fuso, F
    Arimondo, E
    Tuissi, A
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (06): : 927 - 934
  • [22] Shape-memory polymers for biomedical applications
    Yakacki, Christopher M.
    Gall, Ken
    Advances in Polymer Science, 2010, 226 (01) : 147 - 175
  • [23] Shape-Memory Polymers for Biomedical Applications
    Yakacki, Christopher M.
    Gall, Ken
    SHAPE-MEMORY POLYMERS, 2010, 226 : 147 - 175
  • [24] Shape-Memory Polymers for Biomedical Applications
    Delaey, Jasper
    Dubruel, Peter
    Van Vlierberghe, Sandra
    ADVANCED FUNCTIONAL MATERIALS, 2020, 30 (44)
  • [25] The investigation of a shape memory alloy micro-damper for MEMS applications
    Pan, Qiang
    Cho, Chongdu
    SENSORS, 2007, 7 (09) : 1887 - 1900
  • [26] SOME APPLICATIONS OF SHAPE-MEMORY ALLOYS
    WAYMAN, CM
    JOURNAL OF METALS, 1980, 32 (06): : 129 - 137
  • [27] Damping applications of Shape-Memory Alloys
    Hodgson, DE
    SHAPE MEMORY MATERIALS AND ITS APPLICATIONS, 2001, 394-3 : 69 - 74
  • [28] Shape memory alloy thin films and heterostructures for MEMS applications: A review
    Choudhary, Nitin
    Kaur, Davinder
    SENSORS AND ACTUATORS A-PHYSICAL, 2016, 242 : 162 - 181
  • [29] A FUNCTIONALLY GRADIENT NITI SHAPE-MEMORY ALLOY FABRICATED BY SELECTIVE LASER MELTING
    Li, Kun
    Zhan, Jianbin
    Ma, Ruijin
    Ren, Yingzhi
    Lin, Jinxin
    PROCEEDINGS OF ASME 2022 17TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, MSEC2022, VOL 1, 2022,
  • [30] Sputter-deposited shape-memory alloy thin films: Properties and applications
    Ishida, A
    Martynov, V
    MRS BULLETIN, 2002, 27 (02) : 111 - 114
12345