In situ synthesis and characterization of pure SiC nanowires on silicon wafer

被引:24
|
作者
Yang, W [1 ]
Araki, H [1 ]
Thaveethavorn, S [1 ]
Suzuki, H [1 ]
Noda, T [1 ]
机构
[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan
关键词
SiC nanowires; chemical vapor growth; in situ graphite coating;
D O I
10.1016/j.apsusc.2004.09.039
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A simple template/catalyst-free chemical vapor growth process was developed for growing SiC nanowire directly on silicon wafers. The nanowires were identified as single crystalline P-phase SiC growing along <111> direction. The nanowires possess Si-C chemistry. The length and thickness of the nanowires are generally from several tens to over 100 mum and similar to80 nm, respectively. The process also demonstrated the possibility of in situ deposition of thin graphite coatings on the SiC nanowires. A contribution of present work to the applications of SiC nanowires, especially as reinforcement materials in ceramic nanocomposites, is expected. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:236 / 240
页数:5
相关论文
共 50 条
  • [31] SYNTHESIS AND CHARACTERIZATION OF A PURE SILICON-NITRIDE POWDER
    PROCHAZKA, S
    GRESKOVICH, C
    AMERICAN CERAMIC SOCIETY BULLETIN, 1978, 57 (06): : 579 - +
  • [32] Optical characterization of full SiC wafer
    El Harrouni, I
    Bluet, JM
    Ziane, D
    Mermoux, M
    Baillet, F
    Guillot, G
    SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2, 2004, 457-460 : 593 - 596
  • [33] Vertically aligned silicon nanowires fabricated by electroless etching of silicon wafer
    Hutagalung, Sabar D.
    Tan, Agnes S. Y.
    Tan, Ruo Y.
    Wahab, Yussof
    SOUTHEAST ASIAN INTERNATIONAL ADVANCES IN MICRO/NANOTECHNOLOGY, 2010, 7743
  • [34] Effect of Silicon Wafer Resistivity on Morphology and Wettability of Silicon Nanowires Arrays
    Sabrina Naama
    Toufik Hadjersi
    Amina Larabi
    Ghania Nezzal
    Silicon, 2021, 13 : 893 - 899
  • [35] Effect of Silicon Wafer Resistivity on Morphology and Wettability of Silicon Nanowires Arrays
    Naama, Sabrina
    Hadjersi, Toufik
    Larabi, Amina
    Nezzal, Ghania
    SILICON, 2021, 13 (03) : 893 - 899
  • [36] Characterization of silicon wafer haze
    Anderson, TA
    Schade, M
    Zimmer, J
    ADVANCED MATERIALS & PROCESSES, 1998, 153 (03): : 35 - 35
  • [37] Poly(thiophene) nanowires on a silicon (111) wafer.
    Maynor, BW
    Filocamo, SF
    Grinstaff, MW
    Liu, J
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2002, 223 : D80 - D80
  • [38] Characterization of silicon wafer haze
    Anderson, Thomas A.
    Schade, Mark
    Zimmer, Justin
    Advanced Materials and Processes, 1998, 153 (03):
  • [39] Synthesis and wave absorption characterization of SiC nanowires/expanded graphite composites
    Hao, Baoyi
    Tao, Zechao
    Yan, Xi
    Liu, Wei
    Luo, Yun
    Liu, Zhanjun
    Jiang, Dong
    CARBON, 2022, 196 : 540 - 551
  • [40] Synthesis and characterization of SiC nanowires through a reduction-carburization route
    Hu, JQ
    Lu, QK
    Tang, KB
    Deng, B
    Jiang, RR
    Qian, YT
    Yu, WC
    Zhou, GE
    Liu, XM
    Wu, JX
    JOURNAL OF PHYSICAL CHEMISTRY B, 2000, 104 (22): : 5251 - 5254