共 50 条
- [42] A resonant pressure MEMS sensor based on levitation force excitation detection Nonlinear Dynamics, 2020, 100 : 1105 - 1123
- [43] Design and characterisation of the new CIS115 sensor for JANUS, the high resolution camera on JUICE HIGH ENERGY, OPTICAL, AND INFRARED DETECTORS FOR ASTRONOMY VI, 2014, 9154
- [44] Packaged bulk micromachined resonant force sensor for high temperature applications DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS, 2000, 4019 : 379 - 388
- [47] A RESONANT TUNING FORK FORCE SENSOR WITH UNPRECEDENTED COMBINATION OF RESOLUTION AND RANGE 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 545 - 548
- [49] Resonant piezoelectric force sensor using two bending differential modes 2011 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS (ISIE), 2011,
- [50] Design and optimization of a novel resonant gauge pressure sensor INTERNATIONAL CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC TECHNOLOGY AND APPLICATION, 2020, 11617