High Frequency LiNbO3 Bulk Wave Resonator

被引：0

作者：

Gorisse, Marie ^{[1
]}

Dours, Lyvia ^{[1
]}

Perreau, Pierre ^{[1
]}

Ravix, Auralie ^{[1
]}

Lefebvre, Romain ^{[1
]}

Castellan, Gael ^{[1
]}

Maeder-Pachurka, Catherine ^{[1
]}

Bousquet, Marie ^{[1
]}

Reinhardt, Alexandre ^{[1
]}

Bauder, Ruediger ^{[2
]}

Timme, Hans-Joerg ^{[2
]}

Friedrich, Hans-Peter ^{[2
]}

机构：

[1] Univ Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France

[2] Infineon Technol AG, Neubiberg, Germany

来源：

PROCEEDINGS OF THE 2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF-IFCS 2019) | 2019年

关键词：

FBAR; lithium niobate; Smart Cut (TM); thin films;

D O I：

10.1109/fcs.2019.8856017

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Bulk Acoustic Wave Resonators made of lithium niobate thin films obtained by layer transfer techniques relied so far only on full sheet buried electrodes, what is impractical in vue of proper filter implementations. In this work, we introduced patterned bottom electrodes and a sacrificial layer cavity along with a Smart Cut (TM) process. We demonstrate Film Bulk Acoustic Resonators (FBAR) with resonance frequencies in the 2.4 GHz range, electromechanical coupling factors in excess of 39 % and quality factors above 250. This paves the way for introducing high piezoelectric coupling factor monocrystalline materials inside thin film BAW devices.

引用

页数：2

共 50 条

[21] GENERATION OF THIRD HARMONIC OF A HIGH FREQUENCY LONGITUDINAL ACOUSTICAL WAVE FOLLOWING (001)-DIRECTION IN LINBO3
THERY, P
BRIDOUX, E
DELANNOY, M
MORIAMEZ, M
COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES SERIE B, 1970, 270 (01): : 23 - &
[22] Bulk wave excitation from the surface of a LiNbO3 crystal by a system of planar electrodes
Muromets, A. V.
Voloshinov, V. B.
Kanonin, I. A.
17TH RUSSIAN YOUTH CONFERENCE ON PHYSICS OF SEMICONDUCTORS AND NANOSTRUCTURES, OPTO- AND NANOELECTRONICS (RYCPS 2015), 2016, 690
[23] ACOUSTOELECTRIC NONLINEAR EFFECT OF VERTICALLY INCIDENT BULK WAVE AT LINBO3/SI BOUNDARY
LI, W
YIN, JH
SHUI, YG
CHINESE PHYSICS LETTERS, 1993, 10 (06) : 369 - 370
[24] MULTI-FREQUENCY LINBO3 LAMB WAVE RESONATORS WITH < 3Ω IMPEDANCE
Wang, Renyuan
Bhave, Sunil A.
Zhgoon, Sergei
Bhattacharjee, Kushal
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2016, : 679 - 682
[25] LiNbO3-LiNbO3 high overtone bulk acoustic resonator exhibiting high Q.f product
Gachon, D.
Courjon, E.
Masson, J.
Petrini, V.
Rauch, J. Y.
Ballandras, S.
2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 1417 - 1420
[26] HIGH-VOLTAGE BULK PHOTOVOLTAIC EFFECT AND THE PHOTOREFRACTIVE PROCESS IN LINBO3
GLASS, AM
LINDE, DVD
NEGRAN, TJ
APPLIED PHYSICS LETTERS, 1974, 25 (04) : 233 - 235
[27] MICROWAVE FREQUENCY ACOUSTIC SURFACE-WAVE LOS MECHANISMS ON LINBO3
SLOBODNIK, AJ
CARR, PH
BUDREAU, AJ
JOURNAL OF APPLIED PHYSICS, 1970, 41 (11) : 4380 - +
[28] 5.4 GHz Lamb Wave Resonator on LiNbO3 Thin Crystal Plate and Its Application
Kadota, Michio
Ogami, Takashi
JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (07)
[29] Solidly Mounted Resonator using Shear Horizontal Mode Plate Wave in LiNbO3 Plate
Kadota, Michio
Tanaka, Shuji
2016 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS), 2016, : 329 - 332
[30] THE MEASUREMENT OF ELECTROOPTIC COEFFICIENTS OF LINBO3 CRYSTALS AND MODULATION CHARACTERISTICS OF WAVE-GUIDE MODULATORS UTILIZING LINBO3 AT THE FREQUENCY OF 10 GHZ
BUACHIDZE, ZE
MACHAVARIANI, SZ
MOROZOV, VN
NATSVLISHVILI, AG
SEMENOV, AS
CHIRAKADZE, AA
KVANTOVAYA ELEKTRONIKA, 1985, 12 (07): : 1511 - 1516

← 1 2 3 4 5 →