Analytical results for the cluster size distribution in controlled deposition processes

被引:4
|
作者
Ke Jian-Hong [1 ,2 ]
Chen Xiao-Shuang [1 ]
Lin Zhen-Quan [2 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 20083, Peoples R China
[2] Wenzhou Univ, Coll Phys & Elect Informat Engn, Wenzhou 325035, Peoples R China
基金
中国国家自然科学基金;
关键词
cluster growth; deposition; kinetic behaviour; GLANCING-ANGLE DEPOSITION; CHEMICAL-VAPOR-DEPOSITION; SEQUENTIAL ADSORPTION; AGGREGATION KINETICS; ONE-DIMENSION; SOLAR-CELLS; THIN-FILMS; GROWTH; DIFFUSION; ARRAYS;
D O I
10.1088/1674-1056/19/2/026802
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper proposes a controlled particle deposition model for cluster growth on the substrate surface and then presents exact results for the cluster (island) size distribution. In the system, at every time step a fixed number of particles are injected into the system and immediately deposited on to the substrate surface. It investigates the cluster size distribution by employing the generalized rate equation approach. The results exhibit that the evolution behaviour of the system depends crucially on the details of the adsorption rate kernel. The cluster size distribution can take the Poisson distribution or the conventional scaling form in some cases, while it is of a quite complex form in other cases.
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页数:6
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