Experimental dynamic deformation analysis of active stressed lap

被引：4
|
作者：
Zhao, Hongshen [1 ]
Li, Xiaojin [1 ]
Fan, Bin [1 ]
Zeng, Zhige [1 ]
机构：
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
来源：
APPLIED OPTICS | 2016年 / 55卷 / 06期
基金：
中国国家自然科学基金;
关键词：
PRIMARY MIRROR; FABRICATION; VERIFICATION; TOOL;
D O I：
10.1364/AO.55.001190
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We introduce a method to measure the dynamic surface deformation of an active stressed lap for fabricating a 4 mf/1.5 mirror. Lap surface accuracy working in some typical deformation velocities is put forward. Experimental results indicate that dynamic lap surface accuracy is worse than that of a static surface, and dynamic surface accuracy gets worse if deformation velocity increases, while the difference of lap surface error RMS is less than 1 mu m. An optimization of the processing strategy is feasible through changing the deformation velocity of the active stressed lap depending on the processing schedule. After optimizing the grinding and polishing strategy, efficiency is expected to have a significant increase. (C) 2016 Optical Society of America
引用
收藏
页码：1190 / 1197
页数：8
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