Auto-measurement of dimensions on locale

被引：0
|
作者：
Qu, XH [1 ]
Song, LM [1 ]
Jia, GX [1 ]
Qian, XL [1 ]
Lu, BY [1 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
来源：
PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1 | 2002年
关键词：
line CCD sensor; inductance sensor; auto-measurement; optical dynamic scanning measurement;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
For auto-measurement of regulation shapes of products, for instance, wafers, rings, rectangles, between 0.5-50mm in height and 2-30mm in plane dimensions, the system is divided into two parts: An inductance micrometer with a cylinder probe is designed to measure the height and A longer line CCD sensor is adopted to measure two-dimensions on plane. The system can be used to perform implement auto-measurement, data processing and auto-check of eligible and ineligible products on locale. The measurements can reach 0.5 mu m in sensitivit; 3 mu m(2 sigma) in precision; 30 piece/min in speed.
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页码：656 / 659
页数：4
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