Nonlinear model predictive control:: from chemical industry to microelectronics

被引：4
|
作者：
Nagy, ZK [1 ]
Allgöwer, F [1 ]
机构：
[1] Inst Syst Theory Engn, D-70550 Stuttgart, Germany
来源：
2004 43RD IEEE CONFERENCE ON DECISION AND CONTROL (CDC), VOLS 1-5 | 2004年
关键词：
D O I：
10.1109/CDC.2004.1429419
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The paper presents a general overview of nonlinear model predictive control (NMPC), with emphasis on problems related to robust end-point property control of batch processes. The potential advantages of using NMPC in the microelectronics industry are demonstrated using an example process of thin film deposition.
引用
收藏
页码：4249 / 4254
页数：6
相关论文
共 50 条
  • [41] Biotrickling filtration for control of volatile organic compounds from microelectronics industry
    Den, W
    Huang, CP
    Li, CH
    JOURNAL OF ENVIRONMENTAL ENGINEERING-ASCE, 2003, 129 (07): : 610 - 619
  • [42] Combined nonlinear model reduction and multiparametric nonlinear programming for nonlinear model predictive control
    Rivotti, Pedro
    Lambert, Romain S. C.
    Dominguez, Luis
    Pistikopoulos, Efstratios N.
    21ST EUROPEAN SYMPOSIUM ON COMPUTER AIDED PROCESS ENGINEERING, 2011, 29 : 617 - 621
  • [43] Putting nonlinear model predictive control into use
    Foss, Bjarne A.
    Schei, Tor S.
    ASSESSMENT AND FUTURE DIRECTIONS OF NONLINEAR MODEL PREDICTIVE CONTROL, 2007, 358 : 407 - +
  • [44] Nonlinear Model Predictive Control of the Czochralski Process
    Rahmanpour, Parsa
    Saelid, Steinar
    Hovd, Morten
    Gronning, Oddvar
    Jomaa, Moez
    IFAC PAPERSONLINE, 2016, 49 (20): : 120 - 125
  • [45] Model predictive control for nonlinear unsymmetrical systems
    Luo, Xiong-Lin
    Wei, Ming-Hui
    Xu, Feng
    Feng, Ai-Xiang
    Kongzhi yu Juece/Control and Decision, 2013, 28 (05): : 763 - 768
  • [46] Model predictive control of a nonlinear unstable process
    Ozkan, L
    Camurdan, MC
    COMPUTERS & CHEMICAL ENGINEERING, 1998, 22 : S883 - S886
  • [47] Nonlinear model predictive control: Challenges and opportunities
    Mayne, D
    NONLINEAR MODEL PREDICTIVE CONTROL, 2000, 26 : 23 - 44
  • [48] Efficient nonlinear model predictive control algorithms
    Cannon, M
    ANNUAL REVIEWS IN CONTROL, 2004, 28 (02) : 229 - 237
  • [49] Partial stability for nonlinear model predictive control
    La, Huu Chuong
    Potschka, Andreas
    Bock, Hans Georg
    AUTOMATICA, 2017, 78 : 14 - 19
  • [50] Considerations on nonlinear model predictive control techniques
    Manenti, Flavio
    COMPUTERS & CHEMICAL ENGINEERING, 2011, 35 (11) : 2491 - 2509
12345