Polyaniline films with thickness of about 200 nm were deposited on unheated glass substrates by using a vacuum evaporation either HCl-doped or intrinsic polyaniline pellets. Micromorphology and electrical property of the films were studied by using scanning electron microscopy and by measuring their conductivity at room temperature. The films prepared by the HCl-doped polyaniline pellets grow with granular particles whereas those prepared by the intrinsic polyaniline pellets consist of long fibrils as well as granular particles. The micromorphology of the polyaniline films is determined by that of their initial pellets. The conductivity of the films prepared by the HCl-doped polyaniline pellets is 1.5 x 10(-5) S/cm, which is much smaller than that of their initial pellets. The conductivity of the films prepared by the intrinsic polyaniline pellets is 2.3 x 10(-5) S/cm, which is almost equal to that of the intrinsic polyaniline pellets. (C) 2004 Elsevier B.V. All rights reserved.