Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

被引：2
|
作者：
Chen, ZY [1 ]
Zhao, JP
Yu, YH
Wang, X
Yang, SQ
Shi, TS
Liu, XH
Luo, EZ
Xu, JB
Wilson, IH
机构：
[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
[2] Chinese Univ Hong Kong, Dept Elect Engn, Shatin, New Territories, Hong Kong
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1998年 / 17卷 / 04期
关键词：
D O I：
10.1023/A:1006502210376
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：335 / 337
页数：3
相关论文
共 50 条
  • [41] Growth conditions and properties of tetrahedral amorphous carbon films
    Tay, B.K.
    Shi, X.
    Cheah, L.K.
    Flynn, D.I.
    1997, Elsevier Science S.A., Lausanne, Switzerland (308-309)
  • [42] Highly tetrahedral amorphous carbon films with low stress
    Appl Phys Lett, 16 (2344):
  • [43] Optical properties of nitrogenated tetrahedral amorphous carbon films
    Zhang, XW
    Cheung, WY
    Ke, N
    Wong, SP
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (03) : 1242 - 1247
  • [44] Thermal conductivity of ultrathin tetrahedral amorphous carbon films
    Balandin, A. A.
    Shamsa, M.
    Liu, W. L.
    Casiraghi, C.
    Ferrari, A. C.
    APPLIED PHYSICS LETTERS, 2008, 93 (04)
  • [45] ION-IMPLANTATION IN TETRAHEDRAL AMORPHOUS-CARBON
    MCCULLOCH, DG
    GERSTNER, EG
    MCKENZIE, DR
    PRAWER, S
    KALISH, R
    PHYSICAL REVIEW B, 1995, 52 (02): : 850 - 857
  • [46] Chemical bonding modifications of tetrahedral amorphous carbon and nitrogenated tetrahedral amorphous carbon films induced by rapid thermal annealing
    McCann, R
    Roy, SS
    Papakonstantinou, P
    Bain, MF
    Gamble, HS
    McLaughlin, JA
    THIN SOLID FILMS, 2005, 482 (1-2) : 34 - 40
  • [47] INFLUENCE OF CARBON ION ENERGY ON PROPERTIES OF HIGHLY TETRAHEDRAL DIAMOND-LIKE CARBON
    VEERASAMY, VS
    AMARATUNGA, GAJ
    MILNE, WI
    ROBERTSON, J
    FALLON, PJ
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1993, 166 : 1111 - 1114
  • [48] The effect of ion energy on the deposition of amorphous carbon phosphide films
    Pearce, SRJ
    Filik, J
    May, PW
    Wild, RK
    Hallam, KR
    Heard, PJ
    DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 979 - 982
  • [49] INFLUENCE OF ION ENERGY AND FLUX COMPOSITION ON THE PROPERTIES OF PLASMA-DEPOSITED AMORPHOUS-CARBON AND AMORPHOUS HYDROGENATED CARBON-FILMS
    KLEBER, R
    WEILER, M
    KRUGER, A
    SATTEL, S
    KUNZ, G
    JUNG, K
    EHRHARDT, H
    DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) : 246 - 250
  • [50] The study on the stress and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic Ar ion
    Han Liang
    Ning Tao
    Liu De-Lian
    He Liang
    ACTA PHYSICA SINICA, 2012, 61 (17)
12345