Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

被引：3
|
作者：
Kaya, Onurcan [1 ]
Kose, Talha [1 ,2 ]
Azgin, Kivanc [1 ,2 ,3 ]
机构：
[1] METU, Dept Mech Engn, Ankara, Turkey
[2] Middle E Tech Univ, METU MEMS Ctr, Ankara, Turkey
[3] METU, Grad Sch Nat & Appl Sci, Micro & Nanotechnol Program, Ankara, Turkey
来源：
2019 6TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2019) | 2019年
关键词：
Temperature Compensation; DETF; MEMS Resonator; Time Base;
D O I：
10.1109/isiss.2019.8739559
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.
引用
收藏
页数：2
相关论文
共 50 条
  • [21] MINIATURE PRESSURE SENSORS AND THEIR TEMPERATURE COMPENSATION
    KOWALSKI, G
    SENSORS AND ACTUATORS, 1987, 11 (04): : 367 - 376
  • [22] A circuit for the temperature compensation of capacitive sensors
    Grigorie, M
    Iseli, CD
    Krummenacher, F
    Enz, C
    ISCAS 96: 1996 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS - CIRCUITS AND SYSTEMS CONNECTING THE WORLD, VOL 1, 1996, : 381 - 384
  • [23] Temperature compensation of sensors in a meteorological microsystem
    Zhou, Zaifa
    Huang, Qingan
    Qin, Ming
    Zhang, Zhongping
    Dianzi Qijian/Journal of Electron Devices, 2003, 26 (03):
  • [24] MULTIFUNCTIONAL POTENTIOMETRIC GAS SENSOR ARRAY WITH AN INTEGRATED HEATER AND TEMPERATURE SENSORS
    Blackburn, Bryan M.
    White, Briggs
    Wachsman, Eric D.
    ADVANCES IN ELECTRONIC CERAMICS, 2008, 28 (08): : 101 - 108
  • [25] TEMPERATURE COMPENSATION OF PIEZORESISTIVE PRESSURE SENSORS
    AKBAR, M
    SHANBLATT, MA
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) : 155 - 162
  • [26] The Influence of Temperature Disturbance on Space Inertial Sensors
    Hao, Jia
    Wei, Fulong
    Yan, Xingyu
    Ma, Jinlong
    Zhou, Zebing
    Luo, Xiaobing
    SENSORS, 2024, 24 (21)
  • [27] Calibration of Inertial Sensors in the Case of Varying Temperature
    Tarygin, I. E.
    MOSCOW UNIVERSITY MECHANICS BULLETIN, 2019, 74 (01) : 24 - 28
  • [28] Calibration of Inertial Sensors in the Case of Varying Temperature
    I. E. Tarygin
    Moscow University Mechanics Bulletin, 2019, 74 : 24 - 28
  • [29] Transistor temperature measurement for calibration of integrated temperature sensors
    Pertijs, MAP
    Huijsing, JH
    IMTC 2002: PROCEEDINGS OF THE 19TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE, VOLS 1 & 2, 2002, : 755 - 758
  • [30] Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation
    De Brabander, GN
    Beheim, G
    Boyd, JT
    APPLIED OPTICS, 1998, 37 (15): : 3264 - 3267
12345