Deformation characteristics of Au wire bonding

被引:10
|
作者
Saiki, Hiroyuki [1 ]
Nishitake, Hiroshi [1 ]
Yotsumoto, Takahiro [1 ]
Marumo, Yasuo [1 ]
机构
[1] Kumamoto Univ, Dept Mech Syst Engn, Kumamoto 8608555, Japan
关键词
wire bonding; bondability; deformation pattern; integrated circuits;
D O I
10.1016/j.jmatprotec.2007.03.037
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In wire bonding, the quality of the bonding between the Al film and the Au wire has an effect on productivity and reliability. It is required to reduce the bonding area to as small as possible without deteriorating the level of bondability to increase the level of integration. The effect of capillary tip shape on bonding was investigated by deformation analysis of the Au ball by the rigid-plastic finite element method and by experiments. The flow stress of Au wire for the numerical analysis was evaluated by conducting the tensile test of Au wire at an ambient temperature of 250 degrees C. The mean radii and the amount of sliding for the bonded areas were evaluated with respect to the radius of the compression-bonded ball as a parameter under three conditions of capillary tip angle theta:theta = 45 degrees, 60 degrees and 30 degrees. Bonding can be achieved when the amount of sliding is 0.01 -0.05 mu m or greater. With decreasing the capillary tip angle 0, the amount of sliding tends to increase. The amount of sliding can be controlled by changing the tip shape of the capillary. The results of deformation analysis and experiments on An ball deformation indicate that the evaluation of the relationship between the shape of the capillary and bondability can be carried out by rigid-plastic FEM. This method used here is effective for determining the optimum bonding conditions and the proper shape of capillaries. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:16 / 19
页数:4
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