Simultaneous ambient pressure x-ray photoelectron spectroscopy and grazing incidence x-ray scattering in gas environments

被引:10
|
作者
Kersell, Heath [1 ]
Chen, Pengyuan [2 ]
Martins, Henrique [1 ,3 ]
Lu, Qiyang [1 ,4 ]
Brausse, Felix [5 ]
Liu, Bo-Hong [1 ,5 ]
Blum, Monika [1 ,5 ]
Roy, Sujoy [1 ]
Rude, Bruce [1 ]
Kilcoyne, Arthur [1 ]
Bluhm, Hendrik [1 ,5 ,6 ]
Nemsak, Slavomir [1 ]
机构
[1] Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[3] Univ Calif Davis, Dept Phys, Davis, CA 95616 USA
[4] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[5] Lawrence Berkeley Natl Lab, Chem Sci Div, Berkeley, CA 94720 USA
[6] Max Planck Gesell, Dept Inorgan Chem, Fritz Haber Inst, D-14195 Berlin, Germany
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2021年 / 92卷 / 04期
关键词
D O I
10.1063/5.0044162
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed an experimental system to simultaneously measure surface structure, morphology, composition, chemical state, and chemical activity for samples in gas phase environments. This is accomplished by simultaneously measuring x-ray photoelectron spectroscopy (XPS) and grazing incidence x-ray scattering in gas pressures as high as the multi-Torr regime while also recording mass spectrometry. Scattering patterns reflect near-surface sample structures from the nano-scale to the meso-scale, and the grazing incidence geometry provides tunable depth sensitivity of structural measurements. Scattered x rays are detected across a broad range of angles using a newly designed pivoting-UHV-manipulator for detector positioning. At the same time, XPS and mass spectrometry can be measured, all from the same sample spot and under ambient conditions. To demonstrate the capabilities of this system, we measured the chemical state, composition, and structure of Ag-behenate on a Si(001) wafer in vacuum and in O-2 atmosphere at various temperatures. These simultaneous structural, chemical, and gas phase product probes enable detailed insights into the interplay between the structure and chemical state for samples in gas phase environments. The compact size of our pivoting-UHV-manipulator makes it possible to retrofit this technique into existing spectroscopic instruments installed at synchrotron beamlines. Because many synchrotron facilities are planning or undergoing upgrades to diffraction limited storage rings with transversely coherent beams, a newly emerging set of coherent x-ray scattering experiments can greatly benefit from the concepts we present here.
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页数:9
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