Simultaneous ambient pressure x-ray photoelectron spectroscopy and grazing incidence x-ray scattering in gas environments

被引:10
|
作者
Kersell, Heath [1 ]
Chen, Pengyuan [2 ]
Martins, Henrique [1 ,3 ]
Lu, Qiyang [1 ,4 ]
Brausse, Felix [5 ]
Liu, Bo-Hong [1 ,5 ]
Blum, Monika [1 ,5 ]
Roy, Sujoy [1 ]
Rude, Bruce [1 ]
Kilcoyne, Arthur [1 ]
Bluhm, Hendrik [1 ,5 ,6 ]
Nemsak, Slavomir [1 ]
机构
[1] Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[3] Univ Calif Davis, Dept Phys, Davis, CA 95616 USA
[4] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[5] Lawrence Berkeley Natl Lab, Chem Sci Div, Berkeley, CA 94720 USA
[6] Max Planck Gesell, Dept Inorgan Chem, Fritz Haber Inst, D-14195 Berlin, Germany
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2021年 / 92卷 / 04期
关键词
D O I
10.1063/5.0044162
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed an experimental system to simultaneously measure surface structure, morphology, composition, chemical state, and chemical activity for samples in gas phase environments. This is accomplished by simultaneously measuring x-ray photoelectron spectroscopy (XPS) and grazing incidence x-ray scattering in gas pressures as high as the multi-Torr regime while also recording mass spectrometry. Scattering patterns reflect near-surface sample structures from the nano-scale to the meso-scale, and the grazing incidence geometry provides tunable depth sensitivity of structural measurements. Scattered x rays are detected across a broad range of angles using a newly designed pivoting-UHV-manipulator for detector positioning. At the same time, XPS and mass spectrometry can be measured, all from the same sample spot and under ambient conditions. To demonstrate the capabilities of this system, we measured the chemical state, composition, and structure of Ag-behenate on a Si(001) wafer in vacuum and in O-2 atmosphere at various temperatures. These simultaneous structural, chemical, and gas phase product probes enable detailed insights into the interplay between the structure and chemical state for samples in gas phase environments. The compact size of our pivoting-UHV-manipulator makes it possible to retrofit this technique into existing spectroscopic instruments installed at synchrotron beamlines. Because many synchrotron facilities are planning or undergoing upgrades to diffraction limited storage rings with transversely coherent beams, a newly emerging set of coherent x-ray scattering experiments can greatly benefit from the concepts we present here.
引用
收藏
页数:9
相关论文
共 50 条
  • [1] X-ray photoelectron spectroscopy and grazing incidence X-ray reflectivity study of silicon nitride thin films
    Li, BQ
    Fujimoto, T
    Fukumoto, N
    Honda, K
    Kojima, I
    THIN SOLID FILMS, 1998, 334 (1-2) : 140 - 144
  • [2] Grazing incidence X-ray scattering and diffraction
    Basu J.K.
    Resonance, 2014, 19 (12) : 1158 - 1176
  • [3] Liquid-gas interface explored by ambient pressure x-ray photoelectron spectroscopy
    Artiglia, Luca
    Orlando, Fabrizio
    Chen, Shuzhen
    Roy, Kanak
    Gladich, Ivan
    van Bokhoven, Jeroen
    Ammann, Markus
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 254
  • [4] Beyond hard x-ray photoelectron spectroscopy: Simultaneous combination with x-ray diffraction
    Rubio-Zuazo, Juan
    Castro, German R.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (03):
  • [5] X-ray photoelectron spectroscopy under real ambient pressure conditions
    Takagi, Yasumasa
    Nakamura, Takahiro
    Yu, Liwei
    Chaveanghong, Suwilai
    Sekizawa, Oki
    Sakata, Tomohiro
    Uruga, Tomoya
    Tada, Mizuki
    Iwasawa, Yasuhiro
    Yokoyama, Toshihiko
    APPLIED PHYSICS EXPRESS, 2017, 10 (07)
  • [6] X-ray photoelectron spectroscopy in the hard X-ray regime
    Fadley, C. S.
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 2007, 156 : XXXVI - XXXVI
  • [7] Identification of U(VI) sorption products on magnetite by grazing incidence X-ray scattering and X-ray absorption spectroscopy
    Singer, David M.
    Banfield, Jill F.
    Waychunas, Glenn A.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2010, 239
  • [8] X-RAY PHOTOELECTRON SPECTROSCOPY
    HOLLANDER, JM
    JOLLY, WL
    ACCOUNTS OF CHEMICAL RESEARCH, 1970, 3 (06) : 193 - +
  • [9] X-RAY PHOTOELECTRON SPECTROSCOPY
    FRIEDMAN, RM
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1972, : 8 - &
  • [10] X-RAY PHOTOELECTRON SPECTROSCOPY
    SWARTZ, WE
    ANALYTICAL CHEMISTRY, 1973, 45 (09) : A788 - +