Ninety degree domains in RF-sputtered BaTiO3 thin films on platinum substrates

被引:2
|
作者
Jang, JW
Cho, WJ
Lee, JH
Kim, IT
Kim, YH
Kim, CH
Park, JH
Choi, SS
Hahn, TS
机构
[1] Korea Adv Inst Sci & Technol, Appl Phys Grp, Seoul, South Korea
[2] Seoul Natl Univ, Dept Inorgan Mat Engn, Seoul, South Korea
[3] Korea Adv Inst Sci & Technol, Div Ceram, Seoul, South Korea
关键词
BaTiO3 thin films; 90 degrees domains; film stresses; (110)-preferred orientation; (111) twins;
D O I
10.1143/JJAP.36.6937
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report 90 degrees domains in (110)-oriented polycrystalline BaTiO3 thin films. The domain and crystal structures of the thin films were investigated using transmission electron microscopy and high temperature X-ray diffraction, respectively. From X-ray diffraction, it was found that the prepared films had a (110)-preferred orientation and a tetragonal structure at room temperature. Observation in the plan-view and cross-sectional modes using transmission electron microscopy clearly indicated the presence of a 90 degrees domain structure. In the cross-sectional mode, a 90 degrees domain structure was observed along the film growth direction and in the plan-view mode, it was also found that a 90 degrees domain boundary was initiated from the (111) twin boundary. The formation of a 90 degrees domain boundary was discussed in terms of planar defects such as the (111) twin and we also proposed two kinds of stress relief mechanisms induced by 90 degrees domain formation.
引用
收藏
页码:6937 / 6941
页数:5
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