TOWARDS ARTIFICIAL ROBOTIC SKIN: HIGHLY SENSITIVE FLEXIBLE TACTILE SENSING ARRAYS WITH 3D SENSING CAPABILITIES

被引：0

作者：

Weichart, Johannes ^{[1
]}

Ott, Marcel ^{[1
]}

Burger, Thomas ^{[2
]}

Hierold, Christofer ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Dept Mech & Proc Engn, Zurich, Switzerland

[2] Swiss Fed Inst Technol, Dept Informat Technol & Elect Engn, Zurich, Switzerland

来源：

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) | 2022年

关键词：

Tactile sensors; robot sensing systems; capacitive sensors; readout electronics;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Advanced tactile sensing will be one of the key enablers for more interactive and flexible robotics or prosthetics. We proposed a sensing technology, which aims for the replication of the human sense of touch by manufacturing dense arrays (100 sensors/cm(2)) of highly sensitive tactile sensors on a flexible substrate. In this work, we present the characterization of the sensor array with the developed readout electronics, which can resolve capacitance changes of 1.4 fF at an update rate of 5 kS/s and without crosstalk between different sensing cells. Based on those findings we study the sensor response upon actuation with 3D forces and show that they can be resolved.

引用

页码：67 / 70

页数：4

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