Design of MEMS Temperature sensor using Molybdenum Material for Enhancing its Performance

被引：0

作者：

Manikandan, S. S. ^{[1
]}

Prakash, V. R. ^{[1
]}

Saravanan, M. ^{[1
]}

Diderot, P. Kumaraguru ^{[1
]}

机构：

[1] Hindustan Inst Technol & Sci, Elect & Commun Engn, Chennai, Tamil Nadu, India

来源：

PROCEEDINGS OF 2018 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES KOLKATA CONFERENCE (IEEE EDKCON) | 2018年

关键词：

temperature sensor; MEMS; noise immunity; COSMOL Tool; SYSTEM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a design of a Micro Electro Mechanical System (MEMS) based temperature sensor using molybdenum is discussed. The optimization of the shape and dimensions has been done to improve its performance characteristics. The designed MEMS Sensors will have length and width of 6.5mmx4mm respectively to provide better results. The optimized design was converted into a device through fabrication and it was tested. Such temperature sensor results in very high accuracy with excellent noise immunity and small in size. A novel COSMOL multiphysics approach has been employed for designing the sensor to enhance its characteristics.

引用

页码：441 / 444

页数：4

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