Design of MEMS Temperature sensor using Molybdenum Material for Enhancing its Performance

被引：0
|
作者：
Manikandan, S. S. [1 ]
Prakash, V. R. [1 ]
Saravanan, M. [1 ]
Diderot, P. Kumaraguru [1 ]
机构：
[1] Hindustan Inst Technol & Sci, Elect & Commun Engn, Chennai, Tamil Nadu, India
来源：
PROCEEDINGS OF 2018 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES KOLKATA CONFERENCE (IEEE EDKCON) | 2018年
关键词：
temperature sensor; MEMS; noise immunity; COSMOL Tool; SYSTEM;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a design of a Micro Electro Mechanical System (MEMS) based temperature sensor using molybdenum is discussed. The optimization of the shape and dimensions has been done to improve its performance characteristics. The designed MEMS Sensors will have length and width of 6.5mmx4mm respectively to provide better results. The optimized design was converted into a device through fabrication and it was tested. Such temperature sensor results in very high accuracy with excellent noise immunity and small in size. A novel COSMOL multiphysics approach has been employed for designing the sensor to enhance its characteristics.
引用
收藏
页码：441 / 444
页数：4
相关论文
共 50 条
  • [1] Design and fabrication of a high performance resonant MEMS temperature sensor
    Kose, Talha
    Azgin, Kivanc
    Akin, Tayfun
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (04)
  • [2] Enhancing the Performance of MEMS Piezoresistive Pressure Sensor using Germanium Nanowire
    Shaby, S. Maflin
    Premi, M. S. Godwin
    Martin, Betty
    2ND INTERNATIONAL CONFERENCE ON NANOMATERIALS AND TECHNOLOGIES (CNT 2014), 2015, 10 : 254 - 262
  • [3] Performance enhance of CMOS-MEMS thermoelectric infrared sensor by using sensing material and structure design
    Shen, Ting-Wei
    Chang, Kai-Chieh
    Sun, Chih-Ming
    Fang, Weileun
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 29 (02)
  • [4] Design of resonant MEMS temperature sensor
    Ma H.-Y.
    Huang Q.-A.
    Qin M.
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2010, 18 (09): : 2022 - 2027
  • [5] Performance of a MEMS Flow Sensor With High Temperature
    Kang, Qiaoqiao
    Lin, Yuzhe
    Tao, Jifang
    IEEE SENSORS JOURNAL, 2024, 24 (22) : 36426 - 36432
  • [6] Design of piezoresistive pressure sensor for enhancing stress of MEMS cantilever
    Suresh V.
    Rajesh Kumar B.
    Measurement: Sensors, 2023, 25
  • [7] Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method
    Thawornsathit, Phongsakorn
    Juntasaro, Ekachai
    Rattanasonti, Hwanjit
    Pengpad, Putapon
    Saejok, Karoon
    Leepattarapongpan, Chana
    Chaowicharat, Ekalak
    Jeamsaksiri, Wutthinan
    MICROMACHINES, 2022, 13 (12)
  • [8] Design of High Performance Current Reference for MEMS Sensor
    Yang, Ning
    Shi, Yikai
    Wang, Wendong
    PROCEEDINGS OF THE 2013 ASIA-PACIFIC COMPUTATIONAL INTELLIGENCE AND INFORMATION TECHNOLOGY CONFERENCE, 2013, : 915 - 920
  • [9] The Future of the MEMS Inertial Sensor Performance, Design and Manufacturing
    Perlmutter, Michael
    Breit, Stephen
    2016 DGON INERTIAL SENSORS AND SYSTEMS (ISS), 2016,
  • [10] Design and manufacture of a temperature adaptive MEMS wind speed sensor
    Liu Jiajia
    Zhao Wenjie
    Nan Huijie
    Li Guolong
    Shi Yunboe
    MECHANICAL ENGINEERING, MATERIALS SCIENCE AND CIVIL ENGINEERING, 2013, 274 : 624 - +
12345