Deposition and structural analyses of molybdenum-disulfide (MoS2)-amorphous hydrogenated carbon (a-C:H) composite coatings

被引:28
|
作者
Takeno, Takanori [2 ]
Abe, Shingo [3 ]
Adachi, Koshi [3 ]
Miki, Hiroyuki [1 ]
Takagi, Toshiyuki [1 ]
机构
[1] Tohoku Univ, Inst Fluid Sci, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Tohoku Univ, Adv Res & Educ Org, Inst Int Adv Interdisciplinary Res, Aoba Ku, Sendai, Miyagi 9808578, Japan
[3] Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan
关键词
Amorphous carbon; Composite; Molybdenum-disulfide; CVD-PVD hybrid technique; Friction; AMORPHOUS-CARBON; TRIBOLOGICAL PROPERTIES; NANOCOMPOSITE COATINGS; LOW-FRICTION; DLC FILMS; MOS2; ENVIRONMENTS; BEHAVIOR; TRIBOCHEMISTRY;
D O I
10.1016/j.diamond.2009.10.028
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study we developed composite coatings consisting of amorphous hydrogenated carbon (a-C:H) and molybdenum-disulfide (MoS2), and clarified their microstructure. In addition, we interpreted the tribological properties of the composite coatings in the viewpoint of a deposition-induced microstructural modification. The coatings were produced by the hybrid deposition technique of RF-generated methane and argon plasma and DC magnetron co-sputtering of MoS2 target. The deposition parameter investigated in this study was methane flow rate. Structural analyses were performed using a transmission electron microscope (TEM) and an atomic force microscope (AFM). Friction tests were conducted using a ball-on-disk type tribometer. From an electron micrograph, it was confirmed that nano-clusters were embedded into an amorphous carbon host matrix. Surface roughness of the composite coating was similar to 0.25 nm in R-a compared to 5.0 nm in R-a of sputtered MoS2. The concentration measurements were performed, and the results show that the sulfur and molybdenum concentration ratio, [S]/[Mo], is similar to 0.9, which indicates that the amount of sulfur was reduced due to the discharged plasma. In friction tests, composite coatings showed high friction in a vacuum condition. It was considered that lubricant MoS2 lamellar structures showing super-low friction in a vacuum condition during friction could not be formed between ball and coating during friction because of the lack of sulfur in embedded clusters. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:548 / 552
页数:5
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