FRACTAL N/MEMS: FROM PULL-IN INSTABILITY TO PULL-IN STABILITY

被引：135

作者：

Tian, Dan ^{[1
]}

Ain, Qura-Tul ^{[2
,3
]}

Anjum, Naveed ^{[2
,3
]}

He, Chun-Hui ^{[4
]}

Cheng, Bin ^{[1
]}

机构：

[1] Xian Univ Architecture & Technol, Sch Sci, Xian, Peoples R China

[2] Soochow Univ, Coll Text & Clothing Engn, Natl Engn Lab Modern Silk, 199 Ren Ai Rd, Suzhou, Peoples R China

[3] Soochow Univ, Sch Math Sci, Suzhou, Peoples R China

[4] Xian Univ Architecture & Technol, Sch Civil Engn, Xian 710055, Peoples R China

来源：

FRACTALS-COMPLEX GEOMETRY PATTERNS AND SCALING IN NATURE AND SOCIETY | 2021年 / 29卷 / 02期

关键词：

N; MEMS; Pull-in Stability; Fractal Space; Pull-in Instability; Fractal Derivative; VOLTAGE; VIBRATION; CALCULUS;

D O I：

10.1142/S0218348X21500304

中图分类号：

O1 [数学];

学科分类号：

0701 ; 070101 ;

摘要：

Pull-in instability, as an inherent nonlinear problem, continues to become an increasingly important and interesting topic in the design of electrostatic Nano/Micro-electromechanical systems (N/MEMS) devices. Generally, the pull-in instability was studied in a continuous space, but when the electronic devices work in a porous medium, they need to be analyzed in a fractal partner. In this paper, we establish a fractal model for N/MEMS, and find a pull-in stability plateau, which can be controlled by the porous structure, and the pull-in instability can be finally converted to a stable condition. As a result, the pull-in instability can be completely eliminated, realizing the transformation of pull-in instability into pull-in stability.

引用

页数：8

共 50 条

[31] MEMS cantilever beam electrostatic pull-in model
O'Brien, GJ
Monk, DJ
Lin, LW
DESIGN, CHARACTERIZATION, AND PACKAGING FOR MEMS AND MICROELECTRONICS II, 2001, 4593 : 31 - 41
[32] Delayed pull-in transitions in overdamped MEMS devices
Gomez, Michael
Moulton, Derek E.
Vella, Dominic
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 28 (01)
[33] Modeling and Characterization of a Pull-in Free MEMS Microphone
Ozdogan, Mehmet
Towfighian, Shahrzad
Miles, Ronald N.
IEEE SENSORS JOURNAL, 2020, 20 (12) : 6314 - 6323
[34] Pull-in control in MEMS using curved surfaces
Hernandez-Rosas, J.
Esquivel-Sirvent, R.
ADVANCED SUMMER SCHOOL IN PHYSICS 2007: FRONTIERS IN CONTEMPORARY PHYSICS, 2007, 960 : 222 - +
[35] Stability of a micromechanical pull-in voltage reference
Rocha, LA
Cretu, E
Wolffenbuttel, RF
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2003, 52 (02) : 457 - 460
[36] Pull-in effect of RF MEMS shunt switches
Guo, H.
Huang, J. -M.
Deng, Z. L.
ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 5068 - 5071
[37] Noise suppression of MEMS readout near pull-in
Helisto, P.
Sipola, H.
Seppa, H.
SENSORS AND ACTUATORS A-PHYSICAL, 2012, 183 : 101 - 104
[38] Dynamic Pull-in of Shunt Capacitive MEMS Switches
Vummidi, Krishna
Khater, M.
Abdel-Rahman, E.
Nayfeh, A.
Raman, S.
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 622 - +
[39] Pull-in stability of electrostatically actuated MEMS resonant sensor and its control
Shang, H.-L., 1600, Chinese Vibration Engineering Society (32):
[40] Thermal compensated pull-in voltage MEMS inclinometers
Alves, F. S.
Dias, R. A.
Cabral, J.
Gaspar, J.
Rocha, L. A.
28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 831 - 834

← 1 2 3 4 5 →