The promising gas-dynamic schemes of vacuum deposition from the supersonic gas mixture flows

Gas jet deposition (GJD) becomes promising method of thin film and nanoparticle deposition. This paper is focused on elaboration of new methods of GJD based on different gas dynamic schemes of flow formation and interaction with substrate. Using direct statistical simulation method, the analysis was performed for: a) interaction of the jet from the sonic nozzle with a substrate; b) fan flow in the result of interaction of two opposite jets; c) convergent flow from the ring nozzle, directional to the axis; d) interaction of the jet after convergent flow with the substrate; e) fan flow in the result of interaction of two opposite jets after convergent expansion.