Compact laser system for micro-processing applications.

We propose a compact laser system for micro-machining and micro-fabrication applications. The system is mainly composed of a laser source and a beam handling system for 2D scanning combined with an auto focus allowing a third degree of freedom. The laser source is a high power direct diode side-pumped pulsed solid state laser, which produces a high quality and high intensity laser beam. The crystal is a Nd:YAG emitting at 1.06 mu m for industrial micro-material processing, at 1.35 mu m and also at 1.44 mu m for tissue treatments in biomedical applications. The beam handling system consists of a very compact, highly innovative two-axis tilt laser scanner. Electromagnetic actuators drive the mirror and its suspension is based on a cone-ball bearing. It achieves a scan range of +/-3 degrees around x and y with an accuracy better than 0.1%. Such a system finds diverse applications: in the field of industrial cutting, drilling and welding. Furthermore, its small volume allows an easy integration in fabrication processes.