ELLIPSOMETRY OF POROUS n-Si:(Ni, Co) STRUCTURES

被引：0
|
作者：
Treideris, M. [1 ]
Simkiene, I. [1 ]
Reza, A. [1 ]
Babonas, J. [1 ]
机构：
[1] Inst Semicond Phys, LT-01108 Vilnius, Lithuania
来源：
LITHUANIAN JOURNAL OF PHYSICS | 2009年 / 49卷 / 04期
关键词：
porous n-Si; transition metal nanoparticles; null-ellipsometry; SILICON; NANOPARTICLES;
D O I：
10.3952/lithjphys.49406
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The composite samples of porous n-Si, which have been prepared by anodic etching and embedded with Ni and Co nanostructures by electroless process, were investigated by null-ellipsometry technique. The ellipsometric data were analysed in the multilayer model and the composition of porous layer on the substrate surface was determined. The null-ellipsometry technique was shown to be an efficient tool for nondestructive testing and characterization of porous it-Si samples with embedded transition metal structures.
引用
收藏
页码：439 / 444
页数：6
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