The Effect of Film Properties and Laser Processing Parameters on the Laser Ablation of Molybdenum Thin Films

被引：0

作者：

Schneller, Eric ^{[1
]}

Rodrigues, Rafael ^{[1
]}

Dhere, Neelkanth G. ^{[1
]}

Kar, Aravinda ^{[2
]}

机构：

[1] Univ Cent Florida, Florida Solar Energy Ctr, 1679 Clearlake Rd, Cocoa, FL 32922 USA

[2] Univ Cent Florida, Coll Optic & Photon, CREOL, Orlando, FL 32817 USA

来源：

LASER PROCESSING AND FABRICATION FOR SOLAR, DISPLAYS, AND OPTOELECTRONIC DEVICES III | 2014年 / 9180卷

关键词：

Thin-film Solar Cells; Laser Scribing; Photovoltaics; BACK CONTACT; SOLAR;

D O I：

10.1117/12.2062461

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Molybdenum is commonly used as the electrical back contact for Cu(In,Ga)(Se,S) 2 thin-film solar cells. In order to create a monolithically interconnected device, scribing of the molybdenum layer is required. This scribe, known as the P1 scribe, is commonly carried out through laser processing. Optimization of this laser scribing has been carried out using a 532nm pulsed Nd: YAG laser. It was found that two specific regimes of processing resulted in defect free scribes. These regimes are low fluency and high pulse overlap, and high fluency and low pulse overlap. Film properties, including the microstructure, surface oxidation, and internal stress, were studied to understand their effect on the laser ablation process. It was observed that a thin layer of oxidation resulted in significant heat affected zone during the laser ablation process. A discussion of the optimal film properties and laser processing parameters is presented.

引用

页数：6

共 50 条

[21] Influence of the plasma parameters on the properties of aluminum oxide thin films deposited by laser ablation
Escobar-Alarcon, L.
Arrieta, A.
Camps, E.
Romero, S.
Fernandez, M.
Haro-Poniatowski, E.
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 93 (03): : 605 - 609
[22] Influence of the plasma parameters on the properties of aluminum oxide thin films deposited by laser ablation
L. Escobar-Alarcón
A. Arrieta
E. Camps
S. Romero
M. Fernandez
E. Haro-Poniatowski
Applied Physics A, 2008, 93 : 605 - 609
[23] Laser wavelength dependent properties of bn thin films deposited by laser ablation
Suda, Y
Nakazono, T
Ebihara, K
Baba, K
III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 397 - 402
[24] Femtosecond pulsed laser ablation of molybdenum carbide: Nanoparticles and thin film characteristics
De Bonis, A.
Santagata, A.
Sansone, M.
Rau, J. V.
Mori, T.
Teghil, R.
APPLIED SURFACE SCIENCE, 2013, 278 : 321 - 324
[25] LASER SURFACE PROCESSING OF MOLYBDENUM-DISULFIDE THIN-FILMS
JERVIS, TR
NASTASI, M
BAUER, R
FLEISCHAUER, PD
THIN SOLID FILMS, 1989, 181 : 475 - 483
[26] Thin film deposition by laser ablation
Duley, WW
LASER PROCESSING: SURFACE TREATMENT AND FILM DEPOSITION, 1996, 307 : 739 - 750
[27] Laser Ablation and Thin Film Deposition
Zawadzka, A.
Plociennik, P.
Lukasiak, Z.
Bartkiewicz, K.
Korcala, A.
El Ouazzani, H.
Sahraoui, B.
2011 13TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON), 2011,
[28] Advanced processing for the creation of functional thin films using laser ablation
Kawai, T
SECOND INTERNATIONAL CONFERENCE ON PROCESSING MATERIALS FOR PROPERTIES, 2000, : 255 - 256
[29] Effects of deposition parameters on the properties of amorphous carbon nitride thin films prepared by laser ablation
Escobar-Alarcon, L.
Arrieta, A.
Camps, E.
Romero, S.
Romero, S.
Muhl, S.
Camacho-Lopez, M. A.
COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION, 2007, 59 : 492 - +
[30] Tribological properties of TiSiN thin films deposited by laser ablation
Camps, Ivan
Muhl, Stephen
Camps, Enrique
Quinones-Galvan, J. G.
Flores, Martin
SURFACE & COATINGS TECHNOLOGY, 2014, 255 : 74 - 78

← 1 2 3 4 5 →