Nanosecond laser ablation threshold of liquid tin microdroplets

被引:3
|
作者
Meijer, R. A. [1 ,2 ]
Kurilovich, D. [3 ]
Liu, B. [1 ,2 ]
Mazzotta, Z. [1 ]
Hernandez-Rueda, J. [1 ]
Versolato, O. O. [1 ,2 ]
Witte, S. [1 ,2 ]
机构
[1] Adv Res Ctr Nanolithog ARCNL, Sci Pk 106, NL-1098 XG Amsterdam, Netherlands
[2] Vrije Univ, Dept Phys & Astron, LaserLab, De Boelelaan 1105, NL-1081 HV Amsterdam, Netherlands
[3] ASML Netherlands, De Run 6501, NL-5504 DR Veldhoven, Netherlands
来源
关键词
Ablation; Tin; Reflection; INDUCED BREAKDOWN; FEMTOSECOND; REFLECTION; PULSES; VAPORIZATION; METALS; DAMAGE;
D O I
10.1007/s00339-022-05685-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The laser ablation threshold is an important parameter that governs the response of materials to intense laser irradiation. Here we study the ablation threshold of liquid tin, by irradiating tin microdroplets with nanosecond laser pulses having finely controlled temporal shape and duration. We use the time-dependent reflection from the droplet as the main observable, which exhibits a sharp decrease in magnitude at a given time instance that depends on the laser intensity. This moment marks the generation of a plasma that strongly absorbs the following incident laser light, rapidly expands, and thereby sets in motion the remainder of the liquid droplet. We find an inverse-square dependence of this plasma-onset time on laser intensity and attribute this scaling to the presence of one-dimensional heat diffusion during irradiation. This scaling and its one-dimensional thermal origin is strongly established in literature and follows from a square-root scaling of the thermal diffusion depth with time. Our experiment unambiguously shows that this scaling law holds for our specific case of nanosecond laser impact on tin microdroplets. The results presented in this work are of particular interest to target preparation and metrology in extreme-ultraviolet sources utilizing tin microdroplet targets.
引用
收藏
页数:8
相关论文
共 50 条
  • [21] Formation of microstructure on liquid metal surface under nanosecond laser ablation
    Panchenko, Alexei N.
    Bulgakova, Nadezhda M.
    Tel'minov, Alexei E.
    Shulepov, Mikhail A.
    XVIII INTERNATIONAL SYMPOSIUM ON GAS FLOW, CHEMICAL LASERS, AND HIGH-POWER LASERS, 2010, 7751
  • [22] Nanosecond and femtosecond laser photochemistry and ablation dynamics of neat liquid benzenes
    Hatanaka, K
    Tsuboi, Y
    Fukumura, H
    Masuhara, H
    JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (12): : 3049 - 3060
  • [23] Ultraviolet nanosecond laser ablation of polyimide with thermal and nonthermal effects near threshold fluence
    Han, ChangSoon
    Zahid, Muhammad Aleem
    Lee, Byungwoo
    Oh, Jae-Yong
    Kim, Youngkuk
    Yi, Junsin
    JOURNAL OF LASER APPLICATIONS, 2022, 34 (03)
  • [24] Ablation Threshold Measurement and Chemical Modification of UV Nanosecond Laser Micromachining of Polycrystalline Diamond
    Ullah, Naveed
    Cui, Jianlei
    Dong, Xiangyang
    Fang, Xuyang
    Dou, Jian
    Sun, Zheng
    Mei, Xuesong
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2021, 218 (24):
  • [25] Manipulation of ZnO/Polymer Nanocomposites Generated by Nanosecond Laser Ablation in Organic Liquid
    Faramarzi, S.
    Bajelan, S.
    Akbarian, H.
    ACTA PHYSICA POLONICA A, 2013, 123 (01) : 152 - 155
  • [26] Nanosecond pulsed laser ablation of brass in a dry and liquid-confined environment
    Shazia Bashir
    Hamza Vaheed
    Khaliq Mahmood
    Applied Physics A, 2013, 110 : 389 - 395
  • [27] Production of Nanometer-Size GaAs Nanocristals by Nanosecond Laser Ablation in Liquid
    Abderrafi, Kamal
    Jimenez, Ernesto
    Ben, Teresa
    Molina, Sergio I.
    Ibanez, Rafael
    Chirvony, Vladimir
    Martinez-Pastor, Juan P.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2012, 12 (08) : 6774 - 6778
  • [28] Laser-assisted preparation of complex colloidal nanostructures by nanosecond ablation in liquid
    Nikov, Rosen G.
    Nedyalkov, Nikolay N.
    Dikovska, Anna Og.
    Karashanova, Daniela B.
    20TH INTERNATIONAL CONFERENCE AND SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS, 2019, 11047
  • [29] Nanosecond pulsed laser ablation of brass in a dry and liquid-confined environment
    Bashir, Shazia
    Vaheed, Hamza
    Mahmood, Khaliq
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 110 (02): : 389 - 395
  • [30] Formation of Microtower Structures on Liquid Metal Surfaces under Nanosecond Laser Ablation
    Panchenko, A. N.
    Bulgakova, N. M.
    Shulepov, M. A.
    Tel'minov, A. E.
    LAT 2010: INTERNATIONAL CONFERENCE ON LASERS, APPLICATIONS, AND TECHNOLOGIES, 2011, 7994