Effect of buffer layers on p-i-n a-Si:H solar cells deposited at high rate utilising an expanding thermal plasma

被引:3
|
作者
Korevaar, BA [1 ]
Petit, AMHN [1 ]
Smit, C [1 ]
van Swaaij, RACMM [1 ]
van de Sanden, MCM [1 ]
机构
[1] Delft Univ Technol, Lab Elect Components Technol & Mat, DIMES, NL-2600 GB Delft, Netherlands
关键词
D O I
10.1109/PVSC.2002.1190830
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
With a cascaded arc expanding thermal plasma intrinsic amorphous silicon can be deposited at growth rates varying from 0.2 to 10 nm/s. With increasing growth rate good material is obtained at higher deposition temperatures. At higher deposition temperatures the player is deteriorated when the cell is deposited in a p-i-n sequence. A buffer layer can be used as a 'soft start' for the ETP layer and as protection of the p-layer from high deposition temperatures. In this paper we will discuss the effect on p-i-n solar cells when a buffer layer is incorporated.
引用
收藏
页码:1230 / 1233
页数:4
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