共 50 条
- [31] Parametric and theoretical study of hole quality in conventional micro-machining and rotary ultrasonic micro-machining of silicon PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2025, 93 : 167 - 176
- [32] Metal micro-hole formation without recast layer by laser machining and electrochemical machining OPTIK, 2018, 171 : 694 - 705
- [36] Laser micro-machining in the microelectronics industry LASERS IN MATERIAL PROCESSING AND MANUFACTURING, 2002, 4915 : 17 - 22
- [37] Recent advances in laser micro-machining SARATOV FALL MEETING '99: LASER PHYSICS AND SPECTROSCOPY, 2000, 4002 : 2 - 15
- [38] Micro-machining with copper bromide laser 12TH INTERNATIONAL SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS, 2003, 5226 : 372 - 376
- [40] LASER INDUCED PLASMA MICRO-MACHINING PROCEEDINGS OF THE ASME INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE 2010, VOL 2, 2011, : 363 - 369