Improving Performance of Pentacene Field-effect Transistors by Optimizing Substrate Temperature and Active Layer Thickness

被引:0
|
作者
Li, Shi-guang [1 ]
Chen, Peng-hui [1 ]
Liu, Le [1 ]
机构
[1] Xian Univ Technol, Coll Automat & Informat Engn, Xian, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Organic field-effect transistor; pentacene; Substrate temperature; film thickness;
D O I
10.1109/edssc.2019.8753823
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
High performance pentacene-based organic field-effect transistors (OFETs) with different substrates temperatures and film thicknesses were fabricated. The device performance improved visibly the substrate temperature was 69 degrees C and the pentacene film thickness was about 39nm. The field-effect mobility reached as high as 0.42cm(2)/Vs, the subthreshold swing was 534mV/dec, and the on/off ratio was 10(7)-10(8). Electrical properties and film morphology of the device indicate that the substrate temperature affects grain size of the film, and the film thickness affects the trap density of the film.
引用
收藏
页数:3
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