What is the Young's Modulus of Silicon?

被引：1559

作者：

Hopcroft, Matthew A. ^{[1
,2
]}

Nix, William D. ^{[3
]}

Kenny, Thomas W. ^{[4
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[3] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA

[4] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2010年 / 19卷 / 02期

关键词：

Elastic modulus; elasticity; microelectromechanical systems (MEMS) design; Poisson's ratio; shear modulus; silicon; Young's modulus; SINGLE-CRYSTAL SILICON; ELASTIC-CONSTANTS; TEMPERATURE-DEPENDENCE; MECHANICAL-PROPERTIES; POISSONS RATIO; SHEAR MODULUS;

D O I：

10.1109/JMEMS.2009.2039697

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The Young's modulus (E) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of E for analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers. [2009-0054]

引用

页码：229 / 238

页数：10

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