Advances on Doping Strategies for Triple-Gate FinFETs and Lateral Gate-All-Around Nanowire FETs and Their Impact on Device Performance (vol 62, pg 2, 2017)

被引:0
|
作者
Veloso, A. [1 ]
De Keersgieter, A. [1 ]
Matagne, P. [1 ]
Horiguchi, N. [1 ]
Collaert, N. [1 ]
机构
[1] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
关键词
D O I
10.1016/j.mssp.2017.03.013
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:303 / 303
页数:1
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