Synthesis and characterization of the aligned hydrogenated amorphous carbon nanotubes by electron cyclotron resonance excitation

被引:55
|
作者
Tsai, SH
Chiang, FK
Tsai, TG
Shieu, FS
Shih, HC [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[2] Natl Chung Hsing Univ, Inst Mat Engn, Taichung 402, Taiwan
关键词
carbon; chemical vapor deposition; Fourier transform infrared spectroscopy; nanotubes;
D O I
10.1016/S0040-6090(99)01105-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Aligned hydrogenated amorphous carbon nanotubes on porous anodic alumina have been synthesized by electron cyclotron resonance chemical vapor deposition (ECR-CVD) using the precursor gases, acetylene and argon. The composite film, with the aligned hydrogenated amorphous carbon nanotubes embedded in the porous anodic alumina, was found to be robust and is expected to have potential application in optic, electronic and optoelectronic devices. It is possible to prepare a large area of such a film by taking advantages of the ECR-CVD process, e.g. high plasma density at low temperature, less ionic damage, contamination-free and high deposition rate. By adjusting the pore size of anodic alumina, hydrogenated amorphous carbon nanotubes of various diameters can be produced in a range from 230 down to 30 nm. Characterization of the nanotubes in anodic alumina was carried out by field emission scanning electron microscopy (FESEM), Fourier transform infrared spectroscopy (FTIR), transmission electronic microscopy (TEM) and electron energy loss spectroscopy (EELS). The results indicate that the nanotubes consist of amorphous hydrogenated carbon, which are grown at a temperature of similar to 100 degrees C for 4 min. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:11 / 15
页数:5
相关论文
共 50 条
  • [31] Effects of process parameters on the structure of hydrogenated amorphous carbon films processed by electron cyclotron resonance plasma enhanced chemical vapor deposition
    Xie, Dong
    Liu, Hengjun
    Deng, Xingrui
    Leng, Y. X.
    Huang, Nan
    SURFACE & COATINGS TECHNOLOGY, 2010, 204 (18-19): : 3029 - 3033
  • [32] Effect of hydrogen flow on the properties of hydrogenated amorphous carbon films fabricated by electron cyclotron resonance plasma enhanced chemical vapor deposition
    Deng, X. R.
    Leng, Y. X.
    Dong, X.
    Sun, H.
    Huang, Nan
    SURFACE & COATINGS TECHNOLOGY, 2011, 206 (05): : 1007 - 1010
  • [33] INFLUENCE OF LOCAL FEATURE OF ELECTRON-CYCLOTRON-RESONANCE PLASMA ON THE FORMATION OF AMORPHOUS HYDROGENATED SILICON FILMS
    CHEN, W
    MIYAKE, S
    ARIYASU, T
    KYOU, B
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (01): : 285 - 291
  • [34] Low-temperature deposition of hydrogenated amorphous silicon in an electron cyclotron resonance reactor for flexible displays
    Flewitt, AJ
    Milne, WI
    PROCEEDINGS OF THE IEEE, 2005, 93 (07) : 1364 - 1373
  • [35] Effect of microwave pulse on the deposition rate of hydrogenated amorphous silicon in the electron cyclotron resonance plasma deposition
    Sun Moon Univ, Asan, Korea, Republic of
    Japanese Journal of Applied Physics, Part 2: Letters, 1995, 34 (9 B):
  • [36] Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes
    Wang, Zhi
    Ba, Dechun
    Cao, Peijiang
    Yu, Chunhong
    Liang, Ji
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2007, 140 (1-2): : 44 - 47
  • [37] The crystalline properties of carbon nitride nanotubes synthesized by electron cyclotron resonance plasma
    Lai, SH
    Chen, YL
    Chan, LH
    Pan, YM
    Liu, XW
    Shih, HC
    THIN SOLID FILMS, 2003, 444 (1-2) : 38 - 43
  • [38] Electron field emission from amorphous carbon nitride synthesized by electron cyclotron resonance plasma
    Liu, XW
    Tsai, SH
    Lee, LH
    Yang, MX
    Yang, ACM
    Lin, IN
    Shih, HC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (04): : 1840 - 1846
  • [39] Simultaneous synthesis of vertically aligned carbon nanotubes and amorphous carbon thin films on stainless steel
    Romero, Pablo
    Oro, Raquel
    Campos, Monica
    Torralba, Jose M.
    Guzman de Villoria, Roberto
    CARBON, 2015, 82 : 31 - 38
  • [40] ELECTRON-SPIN-RESONANCE STUDIES ON DOPED HYDROGENATED AMORPHOUS SILICON-CARBON
    CHEN, GH
    MORIMOTO, A
    KUMEDA, M
    SHIMIZU, T
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1985, 89 (02): : K181 - K183