Electrode configurations for layered-plate piezoelectric micro-actuators

被引：12

作者：

Nguyen, Cuong H. ^{[1
]}

Farghaly, Mahmoud A. ^{[1
]}

Akram, Muhammad N. ^{[1
]}

Hanke, Ulrik ^{[1
]}

Halvorsen, Einar ^{[1
]}

机构：

[1] Univ Coll Southeast Norway, Dept Micro & Nanosyst Technol, Campus Vestfold,Raveien 215, N-3184 Borre, Norway

来源：

MICROELECTRONIC ENGINEERING | 2017年 / 174卷

关键词：

Piezoelectrics; Actuators; Interdigital electrodes; Spiral electrodes tunable lens; MEMS;

D O I：

10.1016/j.mee.2017.01.023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper investigates piezoelectric micro-actuators with different electrode configurations, i.e., interdigital, spiral and radial electrodes. Using the finite element method, electromechanical performance is evaluated and a comparison of the different micro-actuators is made for equal field strengths. Then, the actuators are considered for tunable lenses and optical parameters are estimated using ray tracing. The interdigital-electrode configuration performs best in both electromechanical and optical analysis. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：59 / 63

页数：5

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