Evolution of the nitrogen depth distribution in an implanted titanium alloy with a surface carbon nanolayer

被引：10

作者：

Vlcak, Petr ^{[1
]}

Horazdovsky, Tomas ^{[1
]}

Valenta, Richard ^{[2
]}

Kovac, Janez ^{[3
]}

机构：

[1] Czech Tech Univ, Fac Mech Engn, Dept Phys, Tech 4, Prague 16607, Czech Republic

[2] Komunardu 57, Prague 17000, Czech Republic

[3] Jozef Stefan Inst, Dept Surface Engn & Optoelect, Jamova 39, Ljubljana 1000, Slovenia

来源：

CHEMICAL PHYSICS LETTERS | 2017年 / 679卷

关键词：

Depth profile; Ion implantation; Mathematical model; Ion energy distribution; Interface; ION-IMPLANTATION; TI-6AL-4V ALLOY; TEMPERATURE; MICROSTRUCTURE; DEPENDENCE; RESISTANCE; PROFILES; HARDNESS; FLUENCE;

D O I：

10.1016/j.cplett.2017.04.066

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The impact of the thickness of the carbon nanolayer on the depth distribution of the implanted nitrogen was examined. Ti6Al4V samples with a carbon nanolayer (20 and 40 nm) were implanted with nitrogen with fluence of 1.2 . 10(17) cm(-2) and an accelerating voltage of 90 kV. GD-OES measurements showed an almost Gaussian-like nitrogen depth profile. The nitrogen peak moves deeper into the sample with increasing thickness of the nanolayer. The experimental depth profiles are in good agreement with the calculated results from the analytical model and from the SRIM2013 code. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：25 / 30

页数：6

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