Hybrid vertical-cavity laser integration on silicon

被引:0
|
作者
Haglund, Emanuel P. [1 ]
Kumari, Sulakshna [2 ,3 ]
Gustavsson, Johan S. [1 ]
Haglund, Erik [1 ]
Roelkens, Gunther [2 ,3 ]
Baets, Roel G. [2 ,3 ]
Larsson, Anders [1 ]
机构
[1] Chalmers Univ Technol, Dept Microtechnol & Nanosci, Photon Lab, SE-41296 Gothenburg, Sweden
[2] Univ Ghent, INTEC Dept, Photon Res Grp, IMEC, Ghent, Belgium
[3] Univ Ghent, Ctr Nano & Biophoton, Ghent, Belgium
来源
基金
欧盟地平线“2020”;
关键词
hybrid vertical-cavity; vertical-cavity surface-emitting laser; heterogeneous integration; photonic integration; silicon photonics; VCSEL;
D O I
10.1117/12.2256983
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The hybrid vertical-cavity laser is a potential low current, high-efficiency, and small footprint light source for silicon photonics integration. As part of the development of such light sources we demonstrate hybrid-cavity VCSELs (HC-VCSELs) on silicon where a GaAs-based half-VCSEL is attached to a dielectric distributed Bragg reflector on silicon by adhesive bonding. HC-VCSELs at 850 nm with sub-mA threshold current, >2 mW output power, and 25 Gbit/s modulation speed are demonstrated. Integration of short-wavelength lasers will enable fully integrated photonic circuits on a silicon-nitride waveguide platform on silicon for applications in life science, bio-photonics, and short-reach optical interconnects.
引用
收藏
页数:8
相关论文
共 50 条
  • [31] Anatomy of a polarization switch of a vertical-cavity semiconductor laser
    Willemsen, MB
    van Exter, MP
    Woerdman, JP
    PHYSICAL REVIEW LETTERS, 2000, 84 (19) : 4337 - 4340
  • [32] Selectively oxidized vertical-cavity laser performance and technology
    Choquette, KD
    Hou, HQ
    Geib, KM
    Hammons, BE
    1998 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 5, 1998, : 283 - 288
  • [33] Experimental Study of Multistability in a Multimode Vertical-Cavity Laser
    S. A. Karuseichik
    V. N. Chizhevsky
    W. L. Zhang
    Journal of Applied Spectroscopy, 2020, 87 : 121 - 127
  • [34] Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm
    Kumari, Sulakshna
    Haglund, Emanuel P.
    Gustavsson, Johan S.
    Larsson, Anders
    Roelkens, Gunther
    Baets, Roel G.
    LASER & PHOTONICS REVIEWS, 2018, 12 (02)
  • [35] Fabrication and characterization of a planarized vertical-cavity surface-emitting laser by using the silicon oxide
    Tsai, CL
    Lee, FM
    Hu, CW
    Wu, MC
    Ko, SC
    Wang, HL
    Ho, WJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1428 - 1433
  • [36] Selective oxidation allows integration of photodetectors and vertical-cavity lasers
    不详
    LASER FOCUS WORLD, 1998, 34 (09): : 11 - 11
  • [37] OPTOELECTRONIC EXCLUSIVE-OR USING HYBRID INTEGRATION OF PHOTOTRANSISTORS AND VERTICAL-CAVITY SURFACE-EMITTING LASERS
    BEYETTE, FR
    GEIB, KM
    STCLAIR, CM
    FELD, SA
    WILMSEN, CW
    IEEE PHOTONICS TECHNOLOGY LETTERS, 1993, 5 (11) : 1322 - 1324
  • [38] Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing
    Giannopoulos, Antonios V.
    Kasten, Ansas M.
    Long, Christopher M.
    Chen, Chen
    Choquette, Kent D.
    APPLIED OPTICS, 2008, 47 (25) : 4555 - 4559
  • [39] Direct integration of aspherical microlens on vertical-cavity surface emitting laser emitting surface for beam shaping
    Li, Qi-Song
    Wang, Li-Jie
    Tian, Zhen-Nan
    Lin, Xiao-Feng
    Jiang, Tong
    Zhang, Jun
    Zhang, Xing
    Zhao, Ji-Hong
    Li, Ai-Wu
    Qin, Li
    OPTICS COMMUNICATIONS, 2013, 300 : 269 - 273
  • [40] Vertical-cavity surface-emitting laser with liquid crystal external cavity
    Xie, Y.
    Beeckman, J.
    Panajotov, K.
    Neyts, K.
    LIQUID CRYSTALS XVIII, 2014, 9182