Development of an ultra-small angular rate sensor element with a laminated quartz tuning fork

被引：0
|
作者：
Ohtsuka, Takahiro [1 ]
Inoue, Takahiro [1 ]
Yoshimatsu, Masahiro [1 ]
Matsudo, Hideryo [1 ]
Okazaki, Masanobu [1 ]
机构：
[1] Nihon Dempa Kogyo Co Ltd, Shibuya Ku, Tokyo, Japan
来源：
PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, VOLS 1 AND 2 | 2006年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have developed an ultra-small angular rate sensor element which was manufactured from a laminated quartz wafer. The quartz tuning fork sensor element (1.3 x 2.2 x 0.24 mm3) is so small that it can be applied to the 2.5 x 3.2 x 1.3 mm3 surface mount type angular rate sensor. This ultrasmall angular rate sensor element consisted of weighted longer arms and a winged base part for damper. According to the experimental result, it was confirmed that the scale factor was 0.67 mV/(deg/s), zero point voltage was 1.349 V and the maximum angular rate was +/- 210 deg/s.
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页码：129 / +
页数：2
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