Barrier-free direct-contact-via (DCV) structures for copper interconnects

被引：5

作者：

Li, CY

Zhang, DH

Wu, JJ

Qi, DX

Su, SS

Qian, Y

Chow, YF

Koh, LT

Foo, PD

机构：

[1] Inst Microelect, Deep Submicron Circuit, Singapore 117685, Singapore

[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

[3] Chartered Semicond Mfg Ltd, Singapore 738406, Singapore

来源：

ELECTRONICS LETTERS | 2002年 / 38卷 / 18期

关键词：

Electric breakdown - Interconnection networks - Plasma etching - Silicon wafers;

D O I：

10.1049/el:20020697

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

New barrier-free direct-contact-via (DCV) structures applicable to 0.18 mum integrated circuits have been developed based on step coverage of the Ta barrier and time-controlled plasma etching. The via resistance in the novel DCV structures could be reduced to 29%, while the breakdown voltage in the novel DCV structures can be enhanced to 150%.

引用

页码：1026 / 1028

页数：3

共 40 条

[31] Barrier-free semimetallic PtSe2 contact formation in two-dimensional PtSe2/PtSe2 homostructure for high-performance field-effect transistors
Kim, Yun-Ho
Kang, Min-Sung
Choi, Jae Won
Lee, Won-Yong
Kim, Min-Jeong
Park, No-Won
Yoon, Young-Gui
Kim, Gil-Sung
Lee, Sang-Kwon
APPLIED SURFACE SCIENCE, 2023, 638
[32] Structure Inheritance in Nanoparticle Ink Direct-Writing Processes and Crack-Free Nano-Copper Interconnects Printed by a Single-Run Approach
Liu, Shujie
Li, Yujie
Xing, Songling
Liu, Lei
Zou, Guisheng
Zhang, Peng
MATERIALS, 2019, 12 (09):
[33] Copper-Mediated Direct Aryl C-H Cyanation with Azobisisobutyronitrile via a Free-Radical Pathway
Xu, Hao
Liu, Peng-Tang
Li, Yun-Hui
Han, Fu-She
ORGANIC LETTERS, 2013, 15 (13) : 3354 - 3357
[34] The effects of different dietary fiber pectin structures on the gastrointestinal immune barrier: impact via gut microbiota and direct effects on immune cells
Beukema, Martin
Faas, Marijke M.
de Vos, Paul
EXPERIMENTAL AND MOLECULAR MEDICINE, 2020, 52 (09): : 1364 - 1376
[35] The effects of different dietary fiber pectin structures on the gastrointestinal immune barrier: impact via gut microbiota and direct effects on immune cells
Martin Beukema
Marijke M. Faas
Paul de Vos
Experimental & Molecular Medicine, 2020, 52 : 1364 - 1376
[36] P-type Schottky-barrier-free contact to MoS2 via layer-number-assisted interface engineering
Zhao, Xiao-Lin
Wang, Nie-Wei
Zhang, Yue-Jiao
Gao, Yu-Meng
Gong, Peng-Lai
Jin, Chen-Dong
Zheng, Xiaohong
Wang, Jiang-Long
Shi, Xing-Qiang
PHYSICAL REVIEW RESEARCH, 2024, 6 (04):
[37] Enhanced Barrier Seed Metallization for Integration of High-Density High Aspect-Ratio Copper-Filled 3D Through-Silicon Via Interconnects
Civale, Yann
Armini, Silvia
Philipsen, Harold
Redolfi, Augusto
Velenis, Dimitrios
Croes, Kristof
Heylen, Nancy
El-Mekki, Zaid
Vandersmissen, Kevin
Beyer, Gerald
Swinnen, Bart
Beyne, Eric
2012 IEEE 62ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2012, : 822 - 826
[38] A gold-free fully copper-metallized InP heterojunction bipolar transistor using non-alloyed ohmic contact and platinum diffusion barrier
Chang, SW
Chang, EY
Lee, CS
Chen, KS
Tseng, CW
Tu, YY
Lee, CT
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (28-32): : L899 - L900
[39] A gold-free fully copper-metallized InP heterojunction bipolar transistor using non-alloyed ohmic contact and platinum diffusion barrier
Chang, S.-W., 1600, Japan Society of Applied Physics (44): : 28 - 32
[40] Wiring-up Carbon Single Wall Nanotubes to Polycrystalline Inorganic Semiconductor Thin Films: Low-Barrier, Copper-Free Back Contact to CdTe Solar Cells
Phillips, Adam B.
Khanal, Rajendra R.
Song, Zhaoning
Zartman, Rosa M.
DeWitt, Jonathan L.
Stone, Jon M.
Roland, Paul J.
Plotnikov, Victor V.
Carter, Chad W.
Stayancho, John M.
Ellingson, Randall J.
Compaan, Alvin D.
Heben, Michael J.
NANO LETTERS, 2013, 13 (11) : 5224 - 5232

← 1 2 3 4 →