共 50 条
- [33] Novel damage-free direct metal gate process using atomic layer deposition 2001 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, 2001, : 65 - 66
- [34] ATOMIC LAYER DEPOSITION OF LITHIUM OXIDE, TIN OXIDE, AND LITHIATED TIN OXIDE NANOFILMS FOR HIGH PERFORMANCE THIN FILM BATTERIES ANODES 10TH ANNIVERSARY INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2018 (R)), 2019, : 169 - 174
- [35] Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2025, 43 (02):
- [36] Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (04):
- [37] Stabilizing lithium metal anodes by atomic layer deposition of metal oxide on carbon network ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 255
- [40] ELECTRICAL/DIELECTRIC PROPERTIES OF METAL-OXIDE NANOFILMS VIA ANODIZING Al/Hf METAL LAYERS 9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017), 2018, : 51 - 56