共 50 条
- [43] Reflectometer-based metrology for high-aspect ratio via measurement OPTICS EXPRESS, 2010, 18 (07): : 7269 - 7280
- [45] Deep high-aspect ratio Si etching for advanced packaging technologies PROCEEDINGS OF THE SYMPOSIUM ON LIGHT EMITTING DEVICES FOR OPTOELECTRONIC APPLICATIONS AND THE TWENTY-EIGHTH STATE-OF-THE-ART PROGRAM ON COMPOUND SEMICONDUCTORS, 1998, 98 (02): : 564 - 572
- [47] Proton beam writing: a tool for high-aspect ratio mask production Microsystem Technologies, 2007, 13 : 431 - 434