Optical spectroscopy of oxygen precipitates in heavily doped p-type silicon

被引：3
|
作者：
Simoen, E
Loo, R
Claeys, C
De Gryse, O
Clauws, P
Van Landuyt, J
Lebedev, O
机构：
[1] IMEC, B-3001 Louvain, Belgium
[2] Katholieke Univ Leuven, EE Dept, B-3001 Louvain, Belgium
[3] Univ Ghent, Dept Solid State Sci, B-9000 Ghent, Belgium
[4] EMAT, RUCA, B-2020 Antwerp, Belgium
来源：
JOURNAL OF PHYSICS-CONDENSED MATTER | 2002年 / 14卷 / 48期
关键词：
D O I：
10.1088/0953-8984/14/48/367
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Results are presented on the photoluminescence (PL) characterization of heavily doped p(+) Czochralski silicon, which has been subjected to a two-step, oxygen precipitation heat treatment. It will be shown that the presence of oxygen precipitates gives rise to the D1, D2 and D5 lines, where the energy of the D1 line shifts to lower values for a stronger degree of precipitation. The occurrence of these PL features is also a function of the boron concentration in the p(+) material. The PL results are compared with Fourier transform infrared absorption data and with transmission electron microscope, results. From this, it is concluded that PL has a good potential for use in the assessment of oxygen precipitation in heavily doped silicon.
引用
收藏
页码：13185 / 13193
页数：9
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