Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements

被引：9
|
作者：
Gao, Long [1 ]
To, Suet [2 ]
Yang, Hongfang [1 ]
Nie, Xin [1 ]
Liu, Tianchen [1 ]
Xue, Changxi [1 ]
机构：
[1] Changchun Univ Sci & Technol, Dept Opt Engn, Changchun 130022, Peoples R China
[2] Hong Kong Polytech Univ, Dept Ind & Syst Engn, State Key Lab Ultra Precis Machining Technol, Kowloon, Hong Kong, Peoples R China
来源：
APPLIED OPTICS | 2014年 / 53卷 / 31期
基金：
中国国家自然科学基金;
关键词：
DESIGN;
D O I：
10.1364/AO.53.007341
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Based on the expression function of diffraction efficiency, and the phase delay function of diffractive optical elements (DOEs), the diffraction efficiency for multilayer diffractive optical elements (MLDOEs) is described with tilt and decenter assembling errors. A mathematical model of the relationship between diffraction efficiency and assembling errors of MLDOEs is proposed to analyze the effect of assembling errors on the diffraction efficiency of MLDOEs. The analyzed results from the mathematical model provide a range of values for the effect of assembling errors on the diffraction efficiency of MLDOEs. Assembling errors are important parameters for hybrid diffractive refractive optical systems, including MLDOEs, and so the proposed model will be useful for guiding the design and fabrication of such optical systems. (C) 2014 Optical Society of America
引用
收藏
页码：7341 / 7347
页数：7
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